JPH0342618Y2 - - Google Patents

Info

Publication number
JPH0342618Y2
JPH0342618Y2 JP1984149958U JP14995884U JPH0342618Y2 JP H0342618 Y2 JPH0342618 Y2 JP H0342618Y2 JP 1984149958 U JP1984149958 U JP 1984149958U JP 14995884 U JP14995884 U JP 14995884U JP H0342618 Y2 JPH0342618 Y2 JP H0342618Y2
Authority
JP
Japan
Prior art keywords
ion
ions
secondary ions
slit
sector magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984149958U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6166353U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149958U priority Critical patent/JPH0342618Y2/ja
Publication of JPS6166353U publication Critical patent/JPS6166353U/ja
Application granted granted Critical
Publication of JPH0342618Y2 publication Critical patent/JPH0342618Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Tubes For Measurement (AREA)
JP1984149958U 1984-10-03 1984-10-03 Expired JPH0342618Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149958U JPH0342618Y2 (en]) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149958U JPH0342618Y2 (en]) 1984-10-03 1984-10-03

Publications (2)

Publication Number Publication Date
JPS6166353U JPS6166353U (en]) 1986-05-07
JPH0342618Y2 true JPH0342618Y2 (en]) 1991-09-06

Family

ID=30708122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149958U Expired JPH0342618Y2 (en]) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPH0342618Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7399806B2 (en) 2003-06-26 2008-07-15 Symyx Technologies, Inc. Synthesis of photoresist polymers

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110693A (en]) * 1974-02-12 1975-08-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7399806B2 (en) 2003-06-26 2008-07-15 Symyx Technologies, Inc. Synthesis of photoresist polymers

Also Published As

Publication number Publication date
JPS6166353U (en]) 1986-05-07

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